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MEMS Microphones as Ultrasonic Transducers: Nonlinear Electrostatic Actuation and a Parametric Array Prototype

Published on Aug 3eess.AS

Authors

Do you know Xiaoyu Niu?You can claim authorship or link another user.Do you know Zihuan Liu?You can claim authorship or link another user.Do you know Ehsan Vatankhah?You can claim authorship or link another user.Do you know Yuqi Meng?You can claim authorship or link another user.Do you know Neal A. Hall?You can claim authorship or link another user.

Abstract

This paper investigates commercial-style capacitive MEMS microphone dies as air-coupled ultrasonic transmitters under nonlinear pull-in and snap-back actuation and demonstrates a compact parametric-array prototype. A single die produces large diaphragm displacement and measurable ultrasonic pressure in air. A 28-die array driven at 83 and 93 kHz generates a directional component at the 10 kHz difference frequency. Measurements are compared with analytical radiation theory and finite-element modeling, and the effects of aperture, fill factor, device uniformity, and receiver nonlinearity are discussed.

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Publication notes

Author note
14 pages, 9 figures. Expanded article based on work presented at the 183rd Meeting of the Acoustical Society of America. This version adds a 28-die parametric-array prototype, analytical and finite-element modeling, and extended discussion. An earlier meeting abstract covering part of this work appeared in J. Acoust. Soc. Am. 152, A50-A51 (2022), DOI: 10.1121/10.0015506